Journalartikel

Ion-conducting probes for low temperature plasmas


AutorenlisteMeiss, SA; Rohnke, M; Rettig, F; Moos, R; Janek, J

Jahr der Veröffentlichung2008

Seiten473-479

ZeitschriftContributions to Plasma Physics

Bandnummer48

Heftnummer5-7

ISSN0863-1042

eISSN1521-3986

DOI Linkhttps://doi.org/10.1002/ctpp.200810076

VerlagWiley-VCH Verlag


Abstract
Probes interacting with a low temperature plasma are typically built of electron conducting materials, mostly metals. We apply yttria-stabilized zirconia (YSZ) which is oxygen ion conducting at elevated temperatures and which is a typical solid electrolyte with high ionic and negligible electronic conductivity. The processes at the plasma vertical bar YSZ interface are discussed and first results of measurements with ion-conducting single- and double-probes in oxygen containing radio frequency plasmas are presented.



Autoren/Herausgeber




Zitierstile

Harvard-ZitierstilMeiss, S., Rohnke, M., Rettig, F., Moos, R. and Janek, J. (2008) Ion-conducting probes for low temperature plasmas, Contributions to Plasma Physics, 48(5-7), pp. 473-479. https://doi.org/10.1002/ctpp.200810076

APA-ZitierstilMeiss, S., Rohnke, M., Rettig, F., Moos, R., & Janek, J. (2008). Ion-conducting probes for low temperature plasmas. Contributions to Plasma Physics. 48(5-7), 473-479. https://doi.org/10.1002/ctpp.200810076



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