Journalartikel
Autorenliste: Dort, K.; Ballabriga, R.; Braach, J.; Buschmann, E.; Campbell, M.; Dannheim, D.; Huth, L.; Kremastiotis, I; Kroeger, J.; Linssen, L.; Munker, M.; Snoeys, W.; Spannagel, S.; Svihra, P.; Vanat, T.
Jahr der Veröffentlichung: 2022
Zeitschrift: Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Bandnummer: 1041
ISSN: 0168-9002
eISSN: 1872-9576
Open Access Status: Hybrid
DOI Link: https://doi.org/10.1016/j.nima.2022.167413
Verlag: Elsevier
Abstract:
Small collection-electrode monolithic CMOS sensors profit from a high signal-to-noise ratio and a small power consumption, but have a limited active sensor volume due to the fabrication process based on thin high -resistivity epitaxial layers. In this paper, the active sensor depth is investigated in the monolithic small collection-electrode technology demonstrator CLICTD. Charged particle beams are used to study the charge -collection properties and the performance of devices with different thicknesses both for perpendicular and inclined particle incidence. In CMOS sensors with a high-resistivity Czochralski substrate, the depth of the sensitive volume is found to increase by a factor two in comparison with standard epitaxial material and leads to significant improvements in the hit-detection efficiency and the spatial and time resolution.
Zitierstile
Harvard-Zitierstil: Dort, K., Ballabriga, R., Braach, J., Buschmann, E., Campbell, M., Dannheim, D., et al. (2022) Comparison of different sensor thicknesses and substrate materials for the monolithic small collection-electrode demonstrator CLICTD, Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1041, Article 167413. https://doi.org/10.1016/j.nima.2022.167413
APA-Zitierstil: Dort, K., Ballabriga, R., Braach, J., Buschmann, E., Campbell, M., Dannheim, D., Huth, L., Kremastiotis, I., Kroeger, J., Linssen, L., Munker, M., Snoeys, W., Spannagel, S., Svihra, P., & Vanat, T. (2022). Comparison of different sensor thicknesses and substrate materials for the monolithic small collection-electrode demonstrator CLICTD. Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 1041, Article 167413. https://doi.org/10.1016/j.nima.2022.167413
Schlagwörter
High-resistivity Czochralski silicon; Inclined particle tracks; Monolithic silicon sensor; Small collection-electrode design
