Journalartikel

Anisotropic Optical Properties of Metastable (01(1)over-bar2) α-Ga2O3 Grown by Plasma-Assisted Molecular Beam Epitaxy


AutorenlisteKracht, M.; Karg, A.; Feneberg, M.; Blaesing, J.; Schoermann, J.; Goldhahn, R.; Eickhoff, M.

Jahr der Veröffentlichung2018

ZeitschriftPhysical Review Applied

Bandnummer10

Heftnummer2

ISSN2331-7019

DOI Linkhttps://doi.org/10.1103/PhysRevApplied.10.024047

VerlagAmerican Physical Society


Abstract
Ga2O3 thin films are grown on (011 (1) over bar2)-oriented (r-plane) alpha-Al2O3 by plasma-assisted MBE (PAMBE). The metastable alpha-Ga2O3 phase is isomorphically stabilized up to a thickness of more than 200 nm, exceeding the maximum layer thickness reported for PAMBE growth on c-plane Al2O3. The thickness is limited by nucleation of ss-Ga2O3 on the exposed c facets of the alpha-Ga2O3. The growth process is characterized by in situ reflection of high-energy electron diffraction and ex situ high-resolution x-ray diffraction measurements. Heteroepitaxial growth of r-plane alpha-Ga2O3 further allows for the determination of the dielectric function's anisotropy. Both the ordinary and the extraordinary elements of the dielectric tensor are determined by spectroscopic ellipsometry measurements. The extraordinary absorption onset is found to be at lower photon energy than the ordinary one. Lineshape analysis for light polarizations perpendicular and parallel to the optic axis reveals band gaps of 5.62 and 5.58 eV, respectively.



Zitierstile

Harvard-ZitierstilKracht, M., Karg, A., Feneberg, M., Blaesing, J., Schoermann, J., Goldhahn, R., et al. (2018) Anisotropic Optical Properties of Metastable (01(1)over-bar2) α-Ga2O3 Grown by Plasma-Assisted Molecular Beam Epitaxy, Physical Review Applied, 10(2), Article 024047. https://doi.org/10.1103/PhysRevApplied.10.024047

APA-ZitierstilKracht, M., Karg, A., Feneberg, M., Blaesing, J., Schoermann, J., Goldhahn, R., & Eickhoff, M. (2018). Anisotropic Optical Properties of Metastable (01(1)over-bar2) α-Ga2O3 Grown by Plasma-Assisted Molecular Beam Epitaxy. Physical Review Applied. 10(2), Article 024047. https://doi.org/10.1103/PhysRevApplied.10.024047



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