Journalartikel

Jahr der Veröffentlichung: 1995

Seiten: 723-731

Zeitschrift: physica status solidi (a) – applications and materials science

Bandnummer: 150

Heftnummer: 2

ISSN: 0031-8965

DOI Link: https://doi.org/10.1002/pssa.2211500215

Verlag: Wiley

Abstract: 
Nd-Fe-B films are prepared by de sputtering. The dependence of the film properties on sputtering parameters is investigated by analysing the surface morphology, crystalline structure, and magnetic properties for different preparation conditions. c-textured films are prepared with a coercivity of up to 0.2 T, a saturation polarization of 1.6 T, and a remanent polarization of 0.4 T. Special emphasis is given to the preparation conditions such that the surface roughness of films with sufficient magnetic performance is well below 100 nm, making these films suitable for micropatterning.

Harvard-Zitierstil: LEMKE, H., MULLER, S., GODDENHENRICH, T. and HEIDEN, C. (1995) INFLUENCE OF PREPARATION CONDITIONS ON THE PROPERTIES OF SPUTTERED ND-FE-B FILMS, physica status solidi (a) – applications and materials science, 150(2), pp. 723-731. https://doi.org/10.1002/pssa.2211500215

APA-Zitierstil: LEMKE, H., MULLER, S., GODDENHENRICH, T., & HEIDEN, C. (1995). INFLUENCE OF PREPARATION CONDITIONS ON THE PROPERTIES OF SPUTTERED ND-FE-B FILMS. physica status solidi (a) – applications and materials science. 150(2), 723-731. https://doi.org/10.1002/pssa.2211500215