Conference paper
Authors list: CHALUPKA, A; STENGL, G; BUSCHBECK, H; LAMMER, G; VONACH, H; FISCHER, R; HAMMEL, E; LOSCHNER, H; NOWAK, R; WOLF, P; FINKELSTEIN, W; HILL, RW; BERRY, IL; HARRIOTT, LR; MELNGAILIS, J; RANDALL, JN; WOLFE, JC; STROH, H; WOLLNIK, H; MONDELLI, AA; PETILLO, JJ; LEUNG, K
Publication year: 1994
Pages: 3513-3517
Volume number: 12
Issue number: 6
ISSN: 0734-211X
DOI Link: https://doi.org/10.1116/1.587461
Conference: 38th International Symposium on Electron, Ion and Photon Beams
Citation Styles
Harvard Citation style: CHALUPKA, A., STENGL, G., BUSCHBECK, H., LAMMER, G., VONACH, H., FISCHER, R., et al. (1994) NOVEL ELECTROSTATIC COLUMN FOR ION PROJECTION LITHOGRAPHY, 38th International Symposium on Electron, Ion and Photon Beams, NEW ORLEANS, LA. pp. 3513-3517. https://doi.org/10.1116/1.587461
APA Citation style: CHALUPKA, A., STENGL, G., BUSCHBECK, H., LAMMER, G., VONACH, H., FISCHER, R., HAMMEL, E., LOSCHNER, H., NOWAK, R., WOLF, P., FINKELSTEIN, W., HILL, R., BERRY, I., HARRIOTT, L., MELNGAILIS, J., RANDALL, J., WOLFE, J., STROH, H., WOLLNIK, H., ...LEUNG, K. (1994). NOVEL ELECTROSTATIC COLUMN FOR ION PROJECTION LITHOGRAPHY. 38th International Symposium on Electron, Ion and Photon Beams, NEW ORLEANS, LA. https://doi.org/10.1116/1.587461
