Conference paper

On the identification of an Al related deep centre in 4H-SiC - Self-compensation in SiC?


Authors listMeyer, BK; Hofstaetter, A; Baranov, PG

Editor listPensl, G; Morkoc, H; Monemar, B; Janzen, E

Publication year1998

Pages591-594

JournalMaterials Science Forum

Volume number264-2

ISSN0255-5476

ISBN0-87849-790-0

DOI Linkhttps://doi.org/10.4028/www.scientific.net/MSF.264-268.591

Conference7th International Conference on Silicon Carbide, III-Nitrides and Related Materials (ICSCIII-N 97)

PublisherTrans Tech Publications

Title of seriesMATERIALS SCIENCE FORUM


Abstract
Using electron paramagnetic (EPR) and electron nuclear double resonance (ENDOR) we identify an Aluminum related deep defect in 4H-SiC. In samples from different vendors the concentration of the deep Al defect equals or even exceeds the shallow Al acceptor concentration.



Citation Styles

Harvard Citation styleMeyer, B., Hofstaetter, A. and Baranov, P. (1998) On the identification of an Al related deep centre in 4H-SiC - Self-compensation in SiC?, Materials Science Forum, 264-2, pp. 591-594. https://doi.org/10.4028/www.scientific.net/MSF.264-268.591

APA Citation styleMeyer, B., Hofstaetter, A., & Baranov, P. (1998). On the identification of an Al related deep centre in 4H-SiC - Self-compensation in SiC?. Materials Science Forum. 264-2, 591-594. https://doi.org/10.4028/www.scientific.net/MSF.264-268.591



Keywords


deep defectENDORhyperfine interaction

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