Journalartikel

Jahr der Veröffentlichung: 1995

Seiten: 426-432

Zeitschrift: Journal of Magnetism and Magnetic Materials

Bandnummer: 148

Heftnummer: 3

ISSN: 0304-8853

DOI Link: https://doi.org/10.1016/0304-8853(94)01705-0

Verlag: Elsevier

Abstract: 
Nd-Fe-B films of 1 mu m thickness have been prepared by dc sputtering. Structural and magnetic film properties are analyzed by using an X-ray diffractometer and a vibrating reed magnetometer. For the investigation of surface morphological properties a scanning force microscope is used. Very smooth films have been examined with regard to their applicability for micro patterning. For that purpose micrometer size magnetic marks have been patterned. Magnetic fields were calculated and compared with magnetic force microscopy images of the marks.

Harvard-Zitierstil: LEMKE, H., LANG, T., GODDENHENRICH, T. and HEIDEN, C. (1995) MICRO PATTERNING OF THIN ND-FE-B FILMS, Journal of Magnetism and Magnetic Materials, 148(3), pp. 426-432. https://doi.org/10.1016/0304-8853(94)01705-0

APA-Zitierstil: LEMKE, H., LANG, T., GODDENHENRICH, T., & HEIDEN, C. (1995). MICRO PATTERNING OF THIN ND-FE-B FILMS. Journal of Magnetism and Magnetic Materials. 148(3), 426-432. https://doi.org/10.1016/0304-8853(94)01705-0