Journal article
Authors list: LEMKE, H; LANG, T; GODDENHENRICH, T; HEIDEN, C
Publication year: 1995
Pages: 426-432
Journal: Journal of Magnetism and Magnetic Materials
Volume number: 148
Issue number: 3
ISSN: 0304-8853
DOI Link: https://doi.org/10.1016/0304-8853(94)01705-0
Publisher: Elsevier
Abstract:
Nd-Fe-B films of 1 mu m thickness have been prepared by dc sputtering. Structural and magnetic film properties are analyzed by using an X-ray diffractometer and a vibrating reed magnetometer. For the investigation of surface morphological properties a scanning force microscope is used. Very smooth films have been examined with regard to their applicability for micro patterning. For that purpose micrometer size magnetic marks have been patterned. Magnetic fields were calculated and compared with magnetic force microscopy images of the marks.
Citation Styles
Harvard Citation style: LEMKE, H., LANG, T., GODDENHENRICH, T. and HEIDEN, C. (1995) MICRO PATTERNING OF THIN ND-FE-B FILMS, Journal of Magnetism and Magnetic Materials, 148(3), pp. 426-432. https://doi.org/10.1016/0304-8853(94)01705-0
APA Citation style: LEMKE, H., LANG, T., GODDENHENRICH, T., & HEIDEN, C. (1995). MICRO PATTERNING OF THIN ND-FE-B FILMS. Journal of Magnetism and Magnetic Materials. 148(3), 426-432. https://doi.org/10.1016/0304-8853(94)01705-0
Keywords
MAGNETIC FORCE MICROSCOPY
